%0 Journal Article %T Fast semi-analytical method for precise prediction of ion energy distribution functions and sheath electric field in multi-frequency capacitively coupled plasmas %A Chen, Wencong %A Zhang, Xi %A Diao, Dongfeng %J Applied Physics Express %V 11 %N 5 %P 5 %@ 1882-0778 %D 2018-05-01 %~ DeepDyve