%0 Journal Article
%T Fast semi-analytical method for precise prediction of ion energy distribution functions and sheath electric field in multi-frequency capacitively coupled plasmas
%A Chen, Wencong
%A Zhang, Xi
%A Diao, Dongfeng
%J Applied Physics Express
%V 11
%N 5
%P 5
%@ 1882-0778
%D 2018-05-01
%~ DeepDyve