%0 Journal Article
%T Systematic error correction of a gap measuring system using a multi-layer artifact
%A Zhou, Sen
%A Xu, Jian
%A Wang, Long
%A Tao, Lei
%A Ding, Yueqing
%J Proceedings of SPIE
%V 10821
%P 108211N-108211N-7
%@ 0277-786X
%D 2018-10-23
%I SPIE
%~ DeepDyve