%0 Journal Article
%T Automatic extraction technique of CD‐SEM evaluation points to measure semiconductor overlay error
%A Miyamoto, Atsushi
%A Kawahara, Toshikazu
%J Electronics & Communications in Japan
%V 102
%N 3
%P 36-44
%@ 1942-9533
%D 2019-03-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve