%0 Journal Article
%T Feature-based process layer modeling for surface micromachined MEMS
%A Li, Jianhua
%A Gao, Shuming
%A Liu, Yusheng
%J Journal of Micromechanics and Microengineering
%V 15
%N 3
%@ 0960-1317
%D 2005-03-01
%~ DeepDyve