%0 Journal Article
%T A Novel Planarization of Oxide‐Filled Shallow‐Trench Isolation
%A Cheng, Juing‐Yi
%A Lei, Tan Fu
%A Chao, Tien Sheng
%A Yen, Daniel L. W.
%A Jin, B. J.
%A Lin, C. J.
%J Journal of the Electrochemical Society
%V 144
%N 1
%P 315-320
%@ 0013-4651
%D 1997-01-01
%~ DeepDyve