%0 Journal Article
%T Beginning-to-end wafer bonding for advanced optical systems
%A Farrens, Shari N.
%A Lindner, Paul
%A Dwyer, Steven
%J Proceedings of SPIE
%V 5177
%N 1
%P 31-36
%@ 0277-786X
%D 2003-11-11
%I SPIE
%~ DeepDyve