%0 Journal Article
%T Crystallization and activation of silicon by microwave rapid annealing
%A Kimura, Shunsuke
%A Ota, Kosuke
%A Hasumi, Masahiko
%A Suzuki, Ayuta
%A Ushijima, Mitsuru
%A Sameshima, Toshiyuki
%J Applied Physics A: Materials Science  Processing
%V 122
%N 7
%P 1-9
%@ 0947-8396
%D 2016-06-24
%I Springer Berlin Heidelberg
%~ DeepDyve