%0 Journal Article %T Crystallization and activation of silicon by microwave rapid annealing %A Kimura, Shunsuke %A Ota, Kosuke %A Hasumi, Masahiko %A Suzuki, Ayuta %A Ushijima, Mitsuru %A Sameshima, Toshiyuki %J Applied Physics A: Materials Science Processing %V 122 %N 7 %P 1-9 %@ 0947-8396 %D 2016-06-24 %I Springer Berlin Heidelberg %~ DeepDyve