%0 Journal Article %T A novel method for determining machine subgroups and backups with an empirical study for semiconductor manufacturing %A Chien, Chen-Fu %A Hsu, Chia-Yu %J Journal of Intelligent Manufacturing %V 17 %N 4 %P 429-439 %@ 0956-5515 %D 2005-12-05 %I Kluwer Academic Publishers %~ DeepDyve