%0 Journal Article
%T Nanopore patterning using Al2O3 hard masks on SOI substrates
%A Wang, Xiaofeng
%A Goryll, Michael
%J Journal of Micromechanics and Microengineering
%V 25
%N 7
%P 6
%@ 0960-1317
%D 2015-07-01
%~ DeepDyve