%0 Journal Article %T Nanopore patterning using Al2O3 hard masks on SOI substrates %A Wang, Xiaofeng %A Goryll, Michael %J Journal of Micromechanics and Microengineering %V 25 %N 7 %P 6 %@ 0960-1317 %D 2015-07-01 %~ DeepDyve