%0 Journal Article %T Flexible and compact perspiration-monitoring system with 0.18 μm BCD process and PDMS micro air-flow path %A Yamamoto, Ayumu %A Kaga, Yuta %A Aso, Tomohiro %A Kuroki, Shin-Ichiro %A Momose, Hideya %A Johguchi, Koh %J Japanese Journal of Applied Physics %V 62 %N SC %P 10 %@ 0021-4922 %D 2023-04-01 %I IOP Publishing %~ DeepDyve