%0 Journal Article
%T Enhancement of overlay metrology accuracy by multi-wavelength scatterometry with rotated quadrupole illumination
%A Kim, Hyunsok
%A Jeong, Ikhyun
%A Hong, Baikkyu
%A Nam, Sunouk
%A Jang, Sumin
%A Lee, Kangmin
%A Su, Hongpeng
%A Jeong, Minho
%A Kim, Mingyu
%A Yang, Hongcheon
%A Zhou, Wayne
%A Oh, Nanglyeom
%A Choi, Dongsub
%A Yaziv, Tal
%A Spielberg, Hedvi
%A Bachar, Ohad
%A Dirawi, Rawi
%J Proceedings of SPIE
%V 12496
%P 1249620-1249620-5
%@ 0277-786X
%D 2023-04-27
%I SPIE
%~ DeepDyve