%0 Journal Article
%T Development of the multi-directional ablation process using the femtosecond laser to create a pattern on the lateral side of a 3D microstructure
%A Ha, Cheol Woo
%A Son, Yong
%J Scientific Reports
%V 13
%N 1
%D 2023-03-23
%I Nature Publishing Group UK
%~ DeepDyve