%0 Journal Article
%T Process trace analytics for process development
%A Baseman, Robert J.
%A Tipu, Fateh A.
%A Englemann, Sebastian U.
%A Papalia, John M.
%A Sagianis, Matthew
%A DeVries, Scott
%A Durrant, Danielle
%A Naczas, Sebastian
%A Pai, Vinay
%A Pancharatnam, Shanti
%J Proceedings of SPIE
%V 11615
%P 116150J-116150J-16
%@ 0277-786X
%D 2021-02-22
%I SPIE
%~ DeepDyve