%0 Journal Article
%T Photoelectric characteristics of different micro structures of black silicon etched by femtosecond laser
%A Zhang, Xiaomo
%A Zhu, Xiangping
%A Liu, Yang
%A Zhao, Wei
%A Jin, Chuan
%A Zhang, Pu
%J Proceedings of SPIE
%V 12617
%P 126170S-126170S-6
%@ 0277-786X
%D 2023-04-04
%I SPIE
%~ DeepDyve