%0 Journal Article %T Advanced hybrid process with back contact IGZO‐TFT %A Honjo, Masatomo %A Takeda, Yujiro %A Aman, Mehadi %A Kobayashi, Shunsuke %A Kitoh, Kenichi %A Ito, Kazuatsu %A Tanaka, Kohei %A Matsukizono, Hiroshi %A Nakamura, Wataru %J Journal of the Society For Information Display %V 30 %N 5 %P 471-481 %@ 1071-0922 %D 2022-05-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve