%0 Journal Article
%T An E-Beam Direct Write Process For Half Micron DRAMS
%A Nomura, Noboru
%A Kawakita, Kenji
%A Sakashita, Toshihiko
%A Harafuji, Kenji
%A Takemoto, Toyoki
%J Proceedings of SPIE
%V 923
%P 281-289
%@ 0277-786X
%D 1988-06-14
%I SPIE
%~ DeepDyve