%0 Journal Article
%T Ultraviolet-Ozone Oxidation of Metal Films
%A Ramanathan, Shriram
%A Chi, David
%A McIntyre, Paul C.
%A Wetteland, Christopher J.
%A Tesmer, Joseph R.
%J Journal of the Electrochemical Society
%V 150
%N 5
%P F110-F115
%@ 0013-4651
%D 2003-04-01
%~ DeepDyve