%0 Journal Article
%T Chemical and Mechanical Aspects of a Co-Cu Planarization Scheme Based on an Alkaline Slurry Formulation
%A Turk, M. C.
%A Shi, X.
%A Gonyer, D. A. J.
%A Roy, D.
%J ECS Journal of Solid State Science and Technology
%V 5
%N 2
%@ 2162-8769
%D 2016-01-01
%~ DeepDyve