%0 Journal Article
%T Production and optimization of a MEMS-based flow direction and velocity sensor
%A Kim, SungHyun
%A Lee, Sang-geun
%A Park, Sekwang
%J Proceedings of SPIE
%V 5344
%N 1
%P 211-223
%@ 0277-786X
%D 2004-01-24
%I SPIE
%~ DeepDyve