%0 Journal Article
%T Thermal and mechanical responses of the thermomechanical microprobe for high-density storage technology
%A Lin, Chun-Te
%J Proceedings of SPIE
%V 6037
%N 1
%P 60370R-60370R-11
%@ 0277-786X
%D 2005-12-28
%I SPIE
%~ DeepDyve