%0 Journal Article
%T Athermal silicon optical interposers operating up to 125 C
%A Urino, Yutaka
%A Hatori, Nobuaki
%A Mizutani, Kenji
%A Usuki, Tatsuya
%A Fujikata, Junichi
%A Yamada, Koji
%A Horikawa, Tsuyoshi
%A Nakamura, Takahiro
%A Arakawa, Yasuhiko
%J Proceedings of SPIE
%V 9390
%P 93900H-93900H-10
%@ 0277-786X
%D 2015-03-09
%I SPIE
%~ DeepDyve