%0 Journal Article
%T Proposal of plane-parallel resonator configuration for high-NA EUV lithography
%A Shintake, Tsumoru
%J Proceedings of SPIE
%V 12292
%P 1229209-1229209-11
%@ 0277-786X
%D 2022-12-01
%I SPIE
%~ DeepDyve