%0 Journal Article
%T Laser-stimulated modification of the structure of silicon layers produced with the LCVD method
%A Dar'yushkin, A. E.
%J Proceedings of SPIE
%V 3404
%N 1
%P 248-251
%@ 0277-786X
%D 1998-05-26
%I SPIE
%~ DeepDyve