%0 Journal Article
%T Device overlay method for high volume manufacturing
%A Lee, Honggoo
%A Han, Sangjun
%A Kim, Youngsik
%A Kim, Myoungsoo
%A Heo, Hoyoung
%A Jeon, Sanghuck
%A Choi, DongSub
%A Nabeth, Jeremy
%A Brinster, Irina
%A Pierson, Bill
%A Robinson, John C.
%J Proceedings of SPIE
%V 9778
%P 97781F-97781F-6
%@ 0277-786X
%D 2016-03-18
%I SPIE
%~ DeepDyve