%0 Journal Article
%T Photobase generator and photo decomposable quencher for high-resolution photoresist applications
%A Wang, C. W.
%J Proceedings of SPIE
%V 7639
%N 1
%P 76390W-76390W-15
%@ 0277-786X
%D 2010-04-09
%I SPIE
%~ DeepDyve