%0 Journal Article
%T Replication processes for metal and ceramic micro parts
%A Piotter, Volker
%A Honza, E.
%A Klein, A.
%A Mueller, T.
%A Plewa, K.
%A Prokop, J.
%J Microsystem Technologies
%V 20
%N 11
%P 2011-2016
%@ 0946-7076
%D 2013-12-24
%I Springer Berlin Heidelberg
%~ DeepDyve