%0 Journal Article
%T Laser-assisted grinding of silicon nitride by picosecond laser
%A Azarhoushang, Bahman
%A Soltani, Babak
%A Zahedi, Ali
%J The International Journal of Advanced Manufacturing Technology
%V 93
%N 8
%P 2517-2529
%@ 0268-3768
%D 2017-07-04
%I Springer London
%~ DeepDyve