%0 Journal Article
%T A Novel Fabrication Method for Flexible SOI Substrate Based on Trench Refilling with Polydimethylsiloxane
%A Zhang, Cang-Hai
%A Yang, Yi
%A Wang, Yu-Feng
%A Zhou, Chang-Jian
%A Shu, Yi
%A Tian, He
%A Ren, Tian-Ling
%J Chinese Physics Letters
%V 30
%N 8
%P 4
%@ 0256-307X
%D 2013-08-01
%~ DeepDyve