%0 Journal Article
%T Development of a new piezoelectric galvanometer scanner: fabrication, operation, and measurements
%A Chiu, Ya-Chu
%A Lin, Chi-Ying
%A Yen, Chien-Yu
%A Huang, Yu-Hsi
%J Smart Materials and Structures
%V 30
%N 7
%P 16
%@ 0964-1726
%D 2021-05-27
%~ DeepDyve