%0 Journal Article
%T MEMS tunable filter for telecom applications
%A Overstolz, Thomas
%A Gale, Michael T.
%A Herzig, Hans Peter
%A Obi, Samuel
%A de Rooij, Nicolaas F.
%J Proceedings of SPIE
%V 5455
%N 1
%P 240-251
%@ 0277-786X
%D 2004-08-16
%I SPIE
%~ DeepDyve