%0 Journal Article
%T Analysis of energy efficiency improvement of high-tech fabrication plants
%A Hu,, Shih-Cheng
%A Lin,, Tee
%A Fu,, Ben-Ran
%A Chang,, Cheng-Kung
%A Cheng,, I-Yun
%J International Journal of Low-Carbon Technologies
%V 14
%N 4
%@ 1748-1317
%D 2019-11-18
%I Oxford University Press
%~ DeepDyve