%0 Journal Article %T Fabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system %A Epifanov, E O %A Tarkhov, M A %A Timofeeva, E R %A Trofimov, I V %A Asharchuk, I M %A Obydennov, D V %A Li, Weichang %A Gonchukov, S A %A Minaev, N V %J Laser Physics Letters %V 18 %N 3 %P 7 %@ 1612-2011 %D 2021-02-06 %~ DeepDyve