%0 Journal Article
%T System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation
%A Song, Zhaohui
%A Sun, Teng
%A Wu, Jian
%A Che, Lufeng
%J Microsystem Technologies
%V 21
%N 10
%P 2233-2240
%@ 0946-7076
%D 2014-09-16
%I Springer Berlin Heidelberg
%~ DeepDyve