%0 Journal Article
%T A capacitive differential pressure sensor with polyimide diaphragm
%A Pedersen, M
%A Meijerink, M G H
%A Olthuis, W
%A Bergveld, P
%J Journal of Micromechanics and Microengineering
%V 7
%N 3
%P 250-252
%@ 0960-1317
%D 1999-01-01
%~ DeepDyve