%0 Journal Article
%T Line width roughness variation and printing failures caused by stochastic effect at extreme-ultraviolet exposure
%A Kang, In-Hwa
%A Kim, Tae-Yi
%A Hur, Su-Mi
%A Ban, Chung-Hyun
%A Park, Jang-Gun
%A Oh, Hye-Keun
%J Proceedings of SPIE
%V 11609
%P 116091K-116091K-11
%@ 0277-786X
%D 2021-02-22
%I SPIE
%~ DeepDyve