%0 Journal Article %T The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing process %A Kim, Sang-Kyun %A Kim, Ye-Hwan %A Paik, Ungyu %A Katoh, Takeo %A Park, Jea-Gun %J Journal of Electroceramics %V 17 %N 4 %P 835-839 %@ 1385-3449 %D 2006-01-01 %I Kluwer Academic Publishers %~ DeepDyve