%0 Journal Article
%T The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing process
%A Kim, Sang-Kyun
%A Kim, Ye-Hwan
%A Paik, Ungyu
%A Katoh, Takeo
%A Park, Jea-Gun
%J Journal of Electroceramics
%V 17
%N 4
%P 835-839
%@ 1385-3449
%D 2006-01-01
%I Kluwer Academic Publishers
%~ DeepDyve