%0 Journal Article
%T Effect of silicon nanowire etching on signal‐to‐noise ratio of SiNW FETs for (bio)sensor applications
%A Moh, T.S.Y.
%A Nie, M.
%A Pandraud, G.
%A Smet, L.C.P.M.
%A Sudhölter, E.J.R.
%A Huang, Q‐A.
%A Sarro, P.M.
%J Electronics Letters
%V 49
%N 13
%P 782-784
%D 2013-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve