%0 Journal Article
%T Study on Cu CMP method using the superconductive assisted machining
%A Yamamoto, Soma
%A Fujioka, Kohei
%A Nakato, Ayumi
%A Otabe, Edmund Soji
%A Suzuki, Keisuke
%J Japanese Journal of Applied Physics
%V 64
%N 3
%P 3
%@ 0021-4922
%D 2025-03-01
%I IOP Publishing
%~ DeepDyve