%0 Journal Article
%T Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power
%A Zhou, Fang-Jie
%A Zhao, Kai
%A Wen, De-Qi
%A Liu, Jian-Kai
%A Liu, Yong-Xin
%A Wang, You-Nian
%J Plasma Sources Science and Technology
%V 30
%N 12
%P 13
%@ 0963-0252
%D 2021-12-01
%I IOP Publishing
%~ DeepDyve