%0 Journal Article
%T Carbon system syntheses on a chip by multiple microplasma CVD
%A Ito, Tsuyohito
%A Katahira, Ken
%A Asahara, Azusa
%A Kulinich, Sergei A
%A Terashima, Kazuo
%J Science and Technology of Advanced Materials
%V 4
%N 6
%@ 1468-6996
%D 2003-11-30
%~ DeepDyve