%0 Journal Article
%T Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique
%A Zhao, Yongjun
%A Cui, Tianhong
%J Journal of Micromechanics and Microengineering
%V 13
%N 3
%@ 0960-1317
%D 2003-05-01
%~ DeepDyve