%0 Journal Article %T Analytical first-order model of light scattering from submicron pyramidal pits %A Jordan, Jr., Michael %A Diaz, Rodolfo E. %A Hirleman, E. Dan %J Proceedings of SPIE %V 4275 %N 1 %P 138-146 %@ 0277-786X %D 2001-06-05 %I SPIE %~ DeepDyve