%0 Journal Article %T Fabrication of Infrared-Compatible Nanofluidic Devices for Plasmon-Enhanced Infrared Absorption Spectroscopy %A Le, Thu Hac Huong %A Matsushita, Takumi %A Ohta, Ryoichi %A Shimoda, Yuta %A Matsui, Hiroaki %A Kitamori, Takehiko %J Micromachines %V 11 %N 12 %@ 2072-666X %D 2020-11-30 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve