%0 Journal Article
%T Improved design of large 3D micromirrors for microassembly into an optical MEMS cross-connect
%A Basha, Mohamed A.
%A Dechev, Nikolai
%A Safavi-Naeini, Safieddin
%J Proceedings of SPIE
%V 6717
%N 1
%P 67170I-67170I-10
%@ 0277-786X
%D 2007-10-08
%I SPIE
%~ DeepDyve