%0 Journal Article
%T Model-based interfacing of large-scale metrology instruments
%A Montavon, Benjamin
%A Peterek, Martin
%A Schmitt, Robert H.
%J Proceedings of SPIE
%V 11059
%P 110590C-110590C-10
%@ 0277-786X
%D 2019-06-21
%I SPIE
%~ DeepDyve