%0 Journal Article
%T Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an Environmentally Stable Chemically Amplified Resist
%A Kim, Jin-Baek
%A Choi, Jae-Hak
%A Kim, Hyunwoo
%A Kwon, Young-Gil
%A Jung, Min-Ho
%J Polymer Journal
%V 31
%N 9
%P 695-699
%@ 0032-3896
%D 2005-03-27
%I Nature Publishing Group UK
%~ DeepDyve