%0 Journal Article
%T Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators
%A Ruiz-Díez, Víctor
%A Ababneh, Abdallah
%A Seidel, Helmut
%A Sánchez-Rojas, José Luis
%J Micromachines
%V 13
%N 8
%@ 2072-666X
%D 2022-07-28
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve