%0 Journal Article
%T Micromachining integration platform for sub-terahertz and terahertz systems
%A Kallfass, Ingmar
%A Vossiek, Martin
%A A. Hein, Matthias
%A Ermolov, Vladimir
%A Lamminen, Antti
%A Saarilahti, Jaakko
%A Wälchli, Ben
%A Kantanen, Mikko
%A Pursula, Pekka
%J International Journal of Microwave and Wireless Technologies
%V 10
%N 5-6
%P 651-659
%@ 1759-0795
%D 2018-04-10
%I Cambridge University Press
%~ DeepDyve