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A computerized spectrophotometer using an acousto‐optic tunable filter is described. The equipment operates between 400 and 700 nm and is applied, for example, to reflected color measurement.
Results of steady‐state discharge test of coaxial LaB 6 cathodes in a multicusp plasma generator are described. After a single‐unit test of a compact, 6.4‐mm‐diam coaxial LaB 6 cathode, a discharge test of two cathodes with one heater power supply was carried out with success. In...
We have developed and tested an inexpensive ion detector with dark‐count rates below 10 − 4 s − 1 and excellent background rejection. Each 40‐keV ion that strikes a grazing‐incidence Al 2 O 3 conversion dynode ejects a few tens of secondary electrons, which enter separate pores of a...
A resistor composed of a piece of Si wafer and two thin silver wires attached to it, can reliably sense the temperature during rapid thermal annealing (RTA). As constant electric current passes through the Si piece, the resistivity change of Si with temperature produces a voltage signal that can...
A time‐of‐flight method for measuring electrostatic potentials in plasmas using a modulated electron beam has been developed. The beam is injected along the magnetic field in a cylindrical plasma geometry. The phase of the electron beam modulation is detected using a Rogowski loop which...
A computer‐controlled four‐detector photopolarimeter (FDP) has been constructed using four windowless planar‐diffused Si photodiodes, operational amplifiers, an analog‐to‐digital (A/D) converter, and a personal computer with peripherals. A nonplanar light path is selected with incidence...
A receiving system for a Thomson scattering experiment is described. This system includes a multichannel grating spectrometer designed for use with a high repetition rate Nd:YAG laser. Fiber‐optic coupling bundles are used at the input and output ends. High throughput is maintained with...
We report simultaneous excitation of at least 19 transverse modes of a curved‐plate, degenerate, Fabry–Perot resonator. The usefulness of spanning large free spectral ranges by means of transverse mode excitation is described.
The design, construction, and operation of a high‐resolution electron energy‐loss spectrometer incorporating a multidetector of 96 discrete anodes are described. In conjunction with temperature and pressure perturbations, this fast data‐acquisition spectrometer allows studies of surface...
A metallorganic vapor phase epitaxy apparatus was built for i n s i t u optical investigations of the gas phase. The quartz reactor lies on a support designed to move in a controlled, steady manner with respect to the optical path. The precision of the displacement is 0.01 mm. Temperature...
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