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A detailed investigation of the effect of argon, oxygen, and methane glow discharge (plasma) treatment of substrates on the adhesion characteristics of parylene polymer to a variety of substrates is reported. It is found that methane glow discharge treatment, which results in the deposition of a...
An ASED molecular orbital study of the binding, structures, and reactions of Cl, Cl 2 , HCl, and HCl+O on 4–21 atom clusters in the Fe(100) structure has been made. Cl; 2 bonds dissociatively (as seen by Dowben and Jones in LEED and TDS studies). Coverage is limited by σ; @B| p repulsions;...
A decoration technique is suggested for measuring the shape and size of ion beam spots. The method is tested for 4 He + incident on Gd 2 (MoO 4 ) 3 .
A simple variation of the Newton’s rings experiment is proposed for quick, relatively accurate stress measurements. The method involves depositing a thin film on a small circular thin substrate, in this case a common microscope cover slip (18 mm diam × 0.18 mm). The thin film then deforms the...
This study describes the results of feature size distribution, pattern location accuracy, and level‐to‐level registration error on chrome master masks fabricated by an Ee; -; BES‐40 electron beam exposure system. The system has the capability of high speed electron beam blanking at 40 MHz,...
The optical properties of reactively sputtered Ta 2 O 5 thin films are investigated in the 0.25–2.5 μm wavelength range. The dispersion curves for the refraction and absorption indices are obtained from the reflectance and transmittance spectra. From the absorption data, one electronic...
A differentially pumped o‐ring‐sealed rotary feedthrough for ultrahigh vacuum applications is described. Its simplified design results in a significant reduction of machining requirements, compared to previous designs.;
Description is given of the preparation and structural properties of thin CdTe films deposited on two Sb–Bi alloys with compositions of 60% and 70% by weight of Sb on Ta substrates, at temperatures just below that of the melting temperature of the alloys, 380° and 430 °C, respectively. The...
A cryopump (APCI Model HV202‐8C) connected to a pump speed test dome was used to evaluate the time and effectiveness of its regeneration using alternate methods of purging and heating the pump. Regeneration effectiveness was determined by measuring the pumping speed and helium adsorption...
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